Semiconductor Gas Systems
Serving the semiconductor and advanced manufacturing sectors with ultra-high-purity gas purification, delivery, monitoring and system integration solutions.
Purification
Delivery
Monitoring
Integration
Getter-based and catalytic purification achieve 9N-grade gas purity with impurities as low as ppt level.
Ultra-high-purity delivery and distribution systems provide stable supply for the most demanding process nodes.
Laser spectroscopy and intelligent sensing enable round-the-clock leak detection with second-level response.
Customized process gas system integration fully meets rigorous semiconductor and advanced manufacturing standards.
Getter Purification System
Leveraging Getter-based purification, catalytic purification and ultra-high-purity gas treatment technologies, we provide dedicated ultra-high-purity gas purification solutions for semiconductor, electronic materials and advanced manufacturing applications — efficiently removing oxygen, moisture, carbon monoxide, carbon dioxide and other trace impurities to meet the demanding gas-purity requirements of advanced processes.
Extreme PurityTrace Impurity ControlStable OperationLong Cycle LifeModular Design
9N Grade
Gas Purity up to
ppt Level
Impurity as low as
Ultra-High-Purity Gas Delivery & Distribution System
Leveraging proprietary ultra-high-purity gas purification, delivery control and system integration technologies, we provide gas delivery, distribution and supply system solutions precisely matched to the demanding safety and stability requirements of ultra-high-purity gas supply in semiconductor, electronic materials and advanced manufacturing.
Extreme PurityStable DeliveryLow Contamination ControlHigh ReliabilityModular Design
9N Grade
Gas Purity up to
ppt Level
Impurity as low as
High-Precision Gas Mixing System
Leveraging precise gas control, precision flow calibration and high-precision blending technologies, we deliver an integrated multi-component gas mixing solution, precisely controlling component ratios and enabling on-demand, precise blending of multiple gases — widely applicable to semiconductor, scientific research, precision testing and advanced manufacturing.
High-Precision BlendingStable OutputIntelligent ControlFast ResponseModular Design
ppm Level
Blending Precision up to
Flexible Multi-Component Configuration
Supported Gas Types
Customized Semiconductor Process Gas Systems
Leveraging proprietary ultra-high-purity gas purification, delivery control and system integration technologies, we customize complete process gas solutions for semiconductor, electronic materials and advanced manufacturing applications, fully meeting the demanding purity, stability and safety standards of advanced process nodes.
Extreme PurityCustom DesignStable OperationIntelligent ControlHigh Reliability
9N Grade
Gas Purity up to
ppt Level
Impurity as low as
Gas Leak Monitoring System
Leveraging proprietary laser spectroscopy and intelligent sensor monitoring technology, combined with electrochemical detection, we offer a high-precision gas leak monitoring solution providing round-the-clock online detection and early warning for hydrogen, methane, helium and other industrial gases — widely serving the energy, chemical, semiconductor and advanced manufacturing industries.
High SensitivityReal-Time Online MonitoringFast ResponseIntelligent AlertingStable & Reliable
ppm Level
Detection Precision up to
Seconds
Response Time as low as
Case Studies
Real-world applications of RefineTek technology across industries.