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Jiangsu Huaxing Laser Gas Purification System (Alloy Getter) Project

Semiconductor

RefineTek

Project Info

IndustrySemiconductor
Product NameGas Purification System (Alloy Getter)
Delivery Date2021

Using RefineTek's proprietary alloy Getter purification technology, the project deeply purifies oxygen, moisture, carbon monoxide, carbon dioxide and other trace impurities from the gas used in semiconductor processes. The purified gas quality meets the customer's demanding advanced-process requirements, and the system runs stably with simple maintenance.